Invention Grant
- Patent Title: Semiconductor memory device and method of manufacturing the same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US15057593Application Date: 2016-03-01
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Publication No.: US09595564B1Publication Date: 2017-03-14
- Inventor: Akihito Ikedo
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L47/00 ; H01L27/22 ; H01L27/24 ; G11C13/00

Abstract:
The embodiments provide a semiconductor memory device including: a plurality of first wiring lines extending in a first direction, the first wiring lines being provided in a second direction intersecting the first direction; a plurality of second wiring lines extending in the second direction, the second wiring lines being provided in the first direction; a plurality of memory cells provided in the intersections between the first wiring lines and the second wiring lines, each memory cell having a first stack structure comprising at least a variable resistor film; a contact extending in a third direction intersecting the first and second directions, the contact having a first end connected to one of the first wiring lines or one of the second wiring lines, the contact having a second stack structure having a stack of a plurality of films; and a wiring layer connected to a second end of the contact. At least some of the films of the second stack structure have generally the same third direction position and film thickness as at least some of layers of the first stack structure. And, the second stack structure has a higher metal ratio than the first stack structure.
Public/Granted literature
- US20170077183A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2017-03-16
Information query
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