Invention Grant
- Patent Title: Method of manufacturing electromechanical transducer, electromechanical transducer, droplet discharge head, droplet discharge apparatus, and image forming apparatus
- Patent Title (中): 制造机电换能器,机电换能器,液滴喷射头,液滴喷射装置和图像形成装置的方法
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Application No.: US14643296Application Date: 2015-03-10
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Publication No.: US09595660B2Publication Date: 2017-03-14
- Inventor: Yoshikazu Akiyama , Naoya Kondo , Satoshi Mizukami
- Applicant: Yoshikazu Akiyama , Naoya Kondo , Satoshi Mizukami
- Applicant Address: JP Tokyo
- Assignee: RICOH COMPANY, LTD.
- Current Assignee: RICOH COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Cooper & Dunham LLP
- Priority: JP2014-050687 20140313
- Main IPC: B41J2/14
- IPC: B41J2/14 ; B41J2/16 ; H01L41/04 ; H01L41/253 ; H01L41/27 ; H01L41/09 ; H01L41/257

Abstract:
A method of manufacturing an electromechanical transducer includes forming a first electrode on a substrate or a base film, forming a piezoelectric film made of lead zirconate titanate on the first electrode, forming a second electrode on the piezoelectric film, and polarizing the piezoelectric film. The polarizing includes applying to the second electrode a positive polarity voltage having a positive polarity relative to a potential of the first electrode, and satisfying a first expression of −EcP−(−Ec) 0.15×EcPav, where −Ec represents an initial coercive field of a negative polarity side of the electromechanical transducer, −EcP represents a coercive field of the negative polarity side after the applying, EcP represents a coercive field of a positive polarity side after the applying, and EcPav represents an average of absolute values of the coercive field −EcP and the coercive field EcP.
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