Invention Grant
US09595660B2 Method of manufacturing electromechanical transducer, electromechanical transducer, droplet discharge head, droplet discharge apparatus, and image forming apparatus 有权
制造机电换能器,机电换能器,液滴喷射头,液滴喷射装置和图像形成装置的方法

Method of manufacturing electromechanical transducer, electromechanical transducer, droplet discharge head, droplet discharge apparatus, and image forming apparatus
Abstract:
A method of manufacturing an electromechanical transducer includes forming a first electrode on a substrate or a base film, forming a piezoelectric film made of lead zirconate titanate on the first electrode, forming a second electrode on the piezoelectric film, and polarizing the piezoelectric film. The polarizing includes applying to the second electrode a positive polarity voltage having a positive polarity relative to a potential of the first electrode, and satisfying a first expression of −EcP−(−Ec) 0.15×EcPav, where −Ec represents an initial coercive field of a negative polarity side of the electromechanical transducer, −EcP represents a coercive field of the negative polarity side after the applying, EcP represents a coercive field of a positive polarity side after the applying, and EcPav represents an average of absolute values of the coercive field −EcP and the coercive field EcP.
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