Invention Grant
- Patent Title: Electroplated phase change switch
- Patent Title (中): 电镀相变开关
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Application No.: US14788183Application Date: 2015-06-30
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Publication No.: US09595669B2Publication Date: 2017-03-14
- Inventor: Christian R. Bonh{hacek over (o)}te , Jeffrey Lille
- Applicant: HGST Netherlands B.V.
- Applicant Address: US CA Irvine
- Assignee: Western Digital Technologies, Inc.
- Current Assignee: Western Digital Technologies, Inc.
- Current Assignee Address: US CA Irvine
- Agency: Patterson & Sheridan, LLP
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
The present disclosure generally relates to a structure, system, and method for manufacturing an electrical component for a memory device. For example, depositing alternating layers of conductive and insulator materials over an etch stop layer to create a vertical stack, etching a trench through the vertical stack to expose the etch stop layer, electroplating the conductive layers using a plating material based on a desired electrical behavior, and forming a connection between the plating materials for each of the conductive layers.
Public/Granted literature
- US20170005263A1 ELECTROPLATED PHASE CHANGE SWITCH Public/Granted day:2017-01-05
Information query
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