Invention Grant
US09595942B2 MOS capacitors with interleaved fingers and methods of forming the same
有权
具有交错手指的MOS电容器及其形成方法
- Patent Title: MOS capacitors with interleaved fingers and methods of forming the same
- Patent Title (中): 具有交错手指的MOS电容器及其形成方法
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Application No.: US15085669Application Date: 2016-03-30
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Publication No.: US09595942B2Publication Date: 2017-03-14
- Inventor: Rien Gahlsdorf , Jianwen Bao
- Applicant: TDK Corporation
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Nixon Peabody LLP
- Main IPC: G05F1/10
- IPC: G05F1/10 ; H03H19/00 ; H01L49/02 ; G05F3/20

Abstract:
A capacitor structure is described. The capacitor structure includes a substrate; a plurality of source/drain regions formed in said substrate to form an active area, the active area having an active area width; and a first and a second plurality of gates formed above the substrate. Each gate of the first and second plurality of gates having a gate width. The gate width is configured to be less than the active area width and each gate of the first and second plurality of gates is formed between a pair of source/drain regions of the plurality of source/drain regions such that the first plurality of gates interleave with the second plurality of gates.
Public/Granted literature
- US20160294367A1 MOS CAPACITORS WITH INTERLEAVED FINGERS AND METHODS OF FORMING THE SAME Public/Granted day:2016-10-06
Information query
IPC分类: