Invention Grant
- Patent Title: Apparatus of etching glass substrate
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Application No.: US13244118Application Date: 2011-09-23
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Publication No.: US09598310B2Publication Date: 2017-03-21
- Inventor: Ah-Ram Lee , Kwan-Young Han
- Applicant: Ah-Ram Lee , Kwan-Young Han
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2010-0106208 20101028
- Main IPC: B08B3/10
- IPC: B08B3/10 ; B24B37/013 ; B24B49/12 ; C03C15/00 ; C03C15/02 ; G01B11/02 ; H01L21/67 ; G01B11/06
Abstract:
An apparatus for etching a glass substrate includes a vessel configured to contain an etchant; a first plate in the vessel and configured to receive a horizontally placed glass substrate thereon; and a circulating unit in the vessel facing the first plate and configured to create a flow of the etchant on a side of the first plate.
Public/Granted literature
- US20120103520A1 APPARATUS OF ETCHING GLASS SUBSTRATE Public/Granted day:2012-05-03
Information query
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