Invention Grant
- Patent Title: Radiation-sensitive resin composition, polymer and method for forming a resist pattern
-
Application No.: US13473957Application Date: 2012-05-17
-
Publication No.: US09598520B2Publication Date: 2017-03-21
- Inventor: Yuko Kiridoshi , Takehiko Naruoka , Yukio Nishimura , Yusuke Asano , Takanori Kawakami , Hiromitsu Nakashima
- Applicant: Yuko Kiridoshi , Takehiko Naruoka , Yukio Nishimura , Yusuke Asano , Takanori Kawakami , Hiromitsu Nakashima
- Applicant Address: JP Tokyo
- Assignee: JSR Corporation
- Current Assignee: JSR Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-263401 20091118; JP2009-264882 20091120
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/38 ; C08F220/24 ; C08F228/00 ; C08F220/22 ; C08L33/14 ; G03F7/039 ; G03F7/11 ; G03F7/20

Abstract:
A radiation-sensitive resin composition includes a first polymer, a second polymer and a radiation-sensitive acid generator. The first polymer has a structure unit represented by a following formula (1-1), a structure unit represented by a following formula (1-2), or both thereof, and has a content of fluorine atoms of no less than 5% by mass to a total mass of the first polymer. The second polymer has an acid-dissociable group, and has a content of fluorine atoms of less than 5% by mass to a total mass of the second polymer.
Public/Granted literature
- US20120295197A1 RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND METHOD FOR FORMING A RESIST PATTERN Public/Granted day:2012-11-22
Information query
IPC分类: