Invention Grant
- Patent Title: Method of forming zinc oxide film (ZnO) or magnesium zinc oxide film (ZnMgO) and apparatus for forming zinc oxide film or magnesium zinc oxide film
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Application No.: US13059356Application Date: 2008-09-24
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Publication No.: US09598768B2Publication Date: 2017-03-21
- Inventor: Takahiro Shirahata , Hiroyuki Orita , Akio Yoshida , Masahisa Kogura
- Applicant: Takahiro Shirahata , Hiroyuki Orita , Akio Yoshida , Masahisa Kogura
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Current Assignee: TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- International Application: PCT/JP2008/067159 WO 20080924
- International Announcement: WO2010/035312 WO 20100401
- Main IPC: C23C16/448
- IPC: C23C16/448 ; C23C16/40 ; C23C16/48 ; C23C18/12 ; H01L21/02 ; C23C16/452 ; C23C16/455
Abstract:
A method of forming a zinc oxide film or a magnesium zinc oxide film which has a high transmittance. The method of forming a zinc oxide film or a magnesium zinc oxide film includes (A) converting a solution containing zinc, or zinc and magnesium into mist, (B) heating a substrate, and (C) supplying the solution converted into mist, and ozone to a first main surface of the substrate under heating.
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