Invention Grant
- Patent Title: Method and system for continuous atomic layer deposition
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Application No.: US14339058Application Date: 2014-07-23
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Publication No.: US09598769B2Publication Date: 2017-03-21
- Inventor: Jeffrey W. Elam , Angel Yanguas-Gil , Joseph A. Libera
- Applicant: UChicago Argonne, LLC
- Applicant Address: US IL Chicago
- Assignee: UCHICAGO ARGONNE, LLC
- Current Assignee: UCHICAGO ARGONNE, LLC
- Current Assignee Address: US IL Chicago
- Agency: Foley & Lardner LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/455 ; H01L51/56 ; H01L51/44 ; C23C16/442 ; C23C16/54 ; H01L51/00

Abstract:
A system and method for continuous atomic layer deposition. The system and method includes a housing, a moving bed which passes through the housing, a plurality of precursor gases and associated input ports and the amount of precursor gases, position of the input ports, and relative velocity of the moving bed and carrier gases enabling exhaustion of the precursor gases at available reaction sites.
Public/Granted literature
- US20150031157A1 METHOD AND SYSTEM FOR CONTINUOUS ATOMIC LAYER DEPOSITION Public/Granted day:2015-01-29
Information query
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