Invention Grant
- Patent Title: Pellicle frame and process for manufacturing same
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Application No.: US14649426Application Date: 2013-11-27
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Publication No.: US09598790B2Publication Date: 2017-03-21
- Inventor: Yoshihiro Taguchi , Takayuki Yamaguchi , Shingo Koizumi , Akira Iizuka , Kiyokazu Koga , Masato Yatsukura
- Applicant: NIPPON LIGHT METAL COMPANY, LTD.
- Applicant Address: JP Tokyo
- Assignee: NIPPON LIGHT METAL COMPANY, LTD.
- Current Assignee: NIPPON LIGHT METAL COMPANY, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2012-265281 20121204
- International Application: PCT/JP2013/081954 WO 20131127
- International Announcement: WO2014/087905 WO 20140612
- Main IPC: G03F1/64
- IPC: G03F1/64 ; C22C21/08 ; C22F1/047 ; C25D11/04 ; C25D11/06 ; C22C21/10 ; C25D11/10 ; C22F1/00

Abstract:
Provided is a pellicle frame that can prevent generation of haze and reduces a surface glittering defect under irradiation with collected light, and a method of manufacturing the same. The pellicle frame is obtained by using an aluminum frame material having a structure satisfying predetermined conditions on the circle-equivalent diameters of a Mg2Si crystallized product, an AlCuMg crystallized product, an Al—Fe-based crystallized product (AlmFe or Al7Cu2Fe), and an Al2CuMg crystallized product and on the area ratios of those crystallized products each having a circle-equivalent diameter of 1 μm or more, and in addition, subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing as an electrolyte a predetermined organic acid salt. In addition, the method of manufacturing a pellicle frame includes: preparing an aluminum frame material having a structure as described above; and subjecting the aluminum frame material to anodic oxidation processing using an alkaline electrolytic solution containing a predetermined organic acid salt, to form an anodic oxide film.
Public/Granted literature
- US20150316842A1 PELLICLE FRAME AND PROCESS FOR MANUFACTURING SAME Public/Granted day:2015-11-05
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