Invention Grant
- Patent Title: Vibration control apparatus, lithography apparatus, and article manufacturing method
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Application No.: US14745790Application Date: 2015-06-22
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Publication No.: US09599185B2Publication Date: 2017-03-21
- Inventor: Ryo Nawata
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-127814 20140623
- Main IPC: G03B27/42
- IPC: G03B27/42 ; F16F15/02 ; G03F7/20

Abstract:
A vibration control apparatus is provided that controls the vibration of a first object supported by a base, the apparatus including: a first control system including a first compensator for outputting a first operation signal representing an input to a first driving unit based on a first detection signal output by a first detector; a second control system including a second compensator for outputting a second operation signal representing an input to a second driving unit based on a second detection signal output by a second detector; and a third control system including a third compensator for outputting a third operation signal representing an input to the first driving unit based on a signal relating to the second control system so as to compensate the vibration of the base.
Public/Granted literature
- US20150369330A1 VIBRATION CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2015-12-24
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