Invention Grant
- Patent Title: Gate valve
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Application No.: US14679227Application Date: 2015-04-06
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Publication No.: US09599233B2Publication Date: 2017-03-21
- Inventor: Tsuneo Ishigaki , Hiromi Shimoda , Takashi Nagao
- Applicant: SMC CORPORATION
- Applicant Address: JP Chiyoda-ku
- Assignee: SMC CORPORATION
- Current Assignee: SMC CORPORATION
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-093750 20140430
- Main IPC: F16K3/02
- IPC: F16K3/02 ; F16K3/18 ; F16K27/04 ; F16K51/02 ; H01L21/67

Abstract:
In a valve box that makes up a gate valve, a balance room is disposed on one side wall that faces toward a processing chamber. In the balance room, a first seal member is provided to surround a first pathway, and a second seal member is mounted on an outer edge of the balance room. Further, a balance port is formed in the balance room. The balance port communicates with an accommodating room that is formed in the interior of the valve box. In a valve closed state in which a valve disk is seated on a valve seat of the valve box, the pressure inside the accommodating room and the pressure inside the balance room are equalized or made uniform through the balance port.
Public/Granted literature
- US20150316155A1 GATE VALVE Public/Granted day:2015-11-05
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