Invention Grant
- Patent Title: Three-dimensional shape measurement apparatus and control method thereof
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Application No.: US14541665Application Date: 2014-11-14
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Publication No.: US09599462B2Publication Date: 2017-03-21
- Inventor: Toshihiro Kobayashi , Shinji Uchiyama
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2013-243343 20131125
- Main IPC: G01B11/25
- IPC: G01B11/25

Abstract:
To measure the three-dimensional shape of a target object with higher accuracy, a three-dimensional shape measurement apparatus projects a pattern image to a predetermined measurement area including a support structure on which the target object is placed; and captures an image of the predetermined measurement area. In addition, the apparatus derives, based on the captured image, a first correction value for correcting a position fluctuation of a support structure, and a second correction value for correcting a fluctuation of a projection position; and calculates, based on the captured image and the first correction value and the second correction value, a plurality of coordinates on a surface of the target object.
Public/Granted literature
- US20150146215A1 THREE-DIMENSIONAL SHAPE MEASUREMENT APPARATUS AND CONTROL METHOD THEREOF Public/Granted day:2015-05-28
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