Invention Grant
- Patent Title: MEMS proof mass with split Z-axis portions
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Application No.: US14658579Application Date: 2015-03-16
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Publication No.: US09599472B2Publication Date: 2017-03-21
- Inventor: Cenk Acar
- Applicant: Fairchild Semiconductor Corporation
- Applicant Address: US CA San Jose
- Assignee: FAIRCHILD SEMICONDUCTOR CORPORATION
- Current Assignee: FAIRCHILD SEMICONDUCTOR CORPORATION
- Current Assignee Address: US CA San Jose
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: G01P15/18
- IPC: G01P15/18 ; G01C19/5733 ; G01P15/125 ; G01P15/08

Abstract:
This document discusses among other things apparatus and methods for a proof mass including split z-axis portions. An example proof mass can include a center portion configured to anchor the proof-mass to an adjacent layer, a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis, a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane, wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.
Public/Granted literature
- US20150185012A1 MEMS PROOF MASS WITH SPLIT Z-AXIS PORTIONS Public/Granted day:2015-07-02
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