Invention Grant
- Patent Title: Thermal flow sensor with vibrating element and gas sensor comprising at least one such sensor
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Application No.: US14030205Application Date: 2013-09-18
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Publication No.: US09599495B2Publication Date: 2017-03-21
- Inventor: Laurent Duraffourg , Philippe Andreucci , Eric Colinet , Guillaume Jourdan , Julien Arcamone
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1258795 20120919
- Main IPC: G01N27/18
- IPC: G01N27/18 ; G01F1/66 ; G01N33/00 ; G01N25/18 ; G01N29/02 ; G01N30/66

Abstract:
The invention relates to a thermal flow sensor comprising: a support, at least one element intended to be vibrated relative to the support, suspension means for said vibrating element relative to the vibrating element, means for heating the vibrating element, means for electrostatic excitation of the vibrating element so as to vibrate it at its resonance frequency, piezoelectric gauges for detecting the resonance frequency variation of the vibrating element, the gauges forming means for heating the vibrating element by Joule effect and the suspension means comprising two beams formed by nanowires so as to reduce the heat losses from the vibrating element toward the support.
Public/Granted literature
- US20140076024A1 THERMAL FLOW SENSOR WITH VIBRATING ELEMENT AND GAS SENSOR COMPRISING AT LEAST ONE SUCH SENSOR Public/Granted day:2014-03-20
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