Invention Grant
- Patent Title: Estimation of spectral feature of pulsed light beam
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Application No.: US14488684Application Date: 2014-09-17
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Publication No.: US09599510B2Publication Date: 2017-03-21
- Inventor: Thomas P. Duffey , Herman Philip Godfried
- Applicant: Cymer, LLC , ASML Netherlands B.V.
- Applicant Address: US CA San Diego NL Veldhoven
- Assignee: Cymer, LLC,ASML Netherlands B.V.
- Current Assignee: Cymer, LLC,ASML Netherlands B.V.
- Current Assignee Address: US CA San Diego NL Veldhoven
- Agency: DiBerardino McGovern IP Group LLC
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/54 ; G03B27/74 ; H01S3/10 ; H01S3/13 ; G01J3/28 ; G03F7/20 ; G01J11/00 ; G01J9/00 ; G01J3/14 ; G01J3/26 ; G01J3/02
Abstract:
A method is described for estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus. The method includes receiving a set of N optical spectra of pulses of the light beam; saving the received N optical spectra to a saved set; transforming the optical spectra in the saved set to form a set of transformed optical spectra; averaging the transformed optical spectra to form an averaged spectrum; and estimating a spectral feature of the pulsed light beam based on the averaged spectrum.
Public/Granted literature
- US20150355025A1 Estimation of Spectral Feature of Pulsed Light Beam Public/Granted day:2015-12-10
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