Invention Grant
- Patent Title: Method to enhance sensitivity to surface normal optical functions of anisotropic films using attenuated total reflection
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Application No.: US14999365Application Date: 2016-04-28
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Publication No.: US09599569B2Publication Date: 2017-03-21
- Inventor: Thomas E. Tiwald , Jeremy A. Van Derslice
- Applicant: J.A. WOOLLAM CO., INC.
- Applicant Address: US NE Lincoln
- Assignee: J.A. WOOLLAM CO., INC.
- Current Assignee: J.A. WOOLLAM CO., INC.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: C23C16/52
- IPC: C23C16/52 ; C23C14/28 ; H05B6/00 ; G01N21/84 ; G02B5/30 ; G02B1/11 ; G02B5/04 ; G02B5/06 ; G01M11/00 ; G01N21/552
Abstract:
Methodology for determining optical functions of thin films with enhanced sensitivity to “p” polarized electromagnetic radiation reflected from both interfaces of an absorbing film.
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