Invention Grant
- Patent Title: Probe microscope with probe movement from heating
-
Application No.: US14905378Application Date: 2014-07-18
-
Publication No.: US09599636B2Publication Date: 2017-03-21
- Inventor: Andrew Humphris
- Applicant: INFINITESIMA LIMITED
- Applicant Address: GB Abingdon
- Assignee: INFINITESIMA LIMITED
- Current Assignee: INFINITESIMA LIMITED
- Current Assignee Address: GB Abingdon
- Agency: Hauptman Ham, LLP
- Priority: GB1313064.6 20130722
- International Application: PCT/GB2014/052196 WO 20140718
- International Announcement: WO2015/011448 WO 20150129
- Main IPC: G01Q10/06
- IPC: G01Q10/06 ; G01Q10/00 ; G01Q20/00

Abstract:
A scanning probe microscope comprising: a signal generator providing a drive signal for an actuator to move a probe repeatedly towards and away from a sample. In response to the detection of an interaction of the probe with the sample the drive signal is modified to cause the probe to move away from the sample. The drive signal comprises an approach phase in which an intensity of the drive signal increases to a maximum value; and a retract phase in which the intensity of the drive signal reduces from the maximum value to a minimum value in response to the detection of the surface position. The intensity of the drive signal is held at the minimum value during the retract phase and then increased at the end of the retract phase. The duration of the retract phase is dependent on the maximum value in the approach phase.
Public/Granted literature
- US20160154022A1 PROBE MICROSCOPE Public/Granted day:2016-06-02
Information query