Invention Grant
- Patent Title: Apparatus for conditioning semiconductor chips and test method using the apparatus
-
Application No.: US13499866Application Date: 2010-09-22
-
Publication No.: US09599662B2Publication Date: 2017-03-21
- Inventor: Klemens Reitinger
- Applicant: Klemens Reitinger
- Applicant Address: DE Germering
- Assignee: ERS Electronic GmbH
- Current Assignee: ERS Electronic GmbH
- Current Assignee Address: DE Germering
- Agency: Norton Rose Fulbright US LLP
- Priority: DE102009045291 20091002
- International Application: PCT/EP2010/063975 WO 20100922
- International Announcement: WO2011/039087 WO 20110407
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R31/28

Abstract:
The present invention provides a device for conditioning semiconductor chips and a corresponding test method. The device comprises a chip temperature control means for receiving a semiconductor chip or a plurality of semiconductor chips and comprises a base body which can be flushed with a fluid for temperature control and which comprises a corresponding number of recesses which extend from a front face to a rear face of the base body; a corresponding number of chip bonding pedestals which are inserted, in thermal contact with the base body, into the recesses which comprise a chip receiving region on the front face and a wiring means on the inside which is constructed for supplying electrical signals from and/or to the semiconductor chip inserted in the respective chip receiving region; and a motherboard attached to the rear face in such a way that the wiring means of the chip bonding pedestals is electrically connected to a wiring means of the motherboard.
Public/Granted literature
- US20120311858A1 APPARATUS FOR CONDITIONING SEMICONDUCTOR CHIPS AND TEST METHOD USING THE APPARATUS Public/Granted day:2012-12-13
Information query