Invention Grant
- Patent Title: Circuit for detecting structural defects in an integrated circuit chip, methods of use and manufacture and design structures
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Application No.: US14713626Application Date: 2015-05-15
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Publication No.: US09599664B2Publication Date: 2017-03-21
- Inventor: Luke D. Lacroix , Mark C. H. Lamorey , Steven F. Oakland , Janak G. Patel , Kerry P. Pfarr , Peter Slota, Jr. , David B. Stone
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: G01R31/3187
- IPC: G01R31/3187 ; G01R31/28 ; H01L21/768 ; H01L21/66

Abstract:
Detection circuits, methods of use and manufacture and design structures are provided herein. The structure includes at least one signal line traversing one or more metal layers of an integrated circuit. Circuitry is coupled to the at least one signal line, which is structured to receive a signal with a known signal from the at least one signal line or a signal from a different potential and, based on which signal is received, determine whether there is a structural defect in the integrated circuit.
Public/Granted literature
Information query
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