Invention Grant
- Patent Title: Visible light laser voltage probing on thinned substrates
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Application No.: US14836713Application Date: 2015-08-26
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Publication No.: US09599667B1Publication Date: 2017-03-21
- Inventor: Joshua Beutler , John Joseph Clement , Mary A. Miller , Jeffrey Stevens , Edward I. Cole, Jr.
- Applicant: Sandia Corporation
- Applicant Address: US NM Albuquerque
- Assignee: Sandia Corporation
- Current Assignee: Sandia Corporation
- Current Assignee Address: US NM Albuquerque
- Agency: Medley, Behrens & Lewis, LLC
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01R31/311 ; H01L21/66 ; H01L21/3065 ; H01L21/67 ; G01N21/95

Abstract:
The various technologies presented herein relate to utilizing visible light in conjunction with a thinned structure to enable characterization of operation of one or more features included in an integrated circuit (IC). Short wavelength illumination (e.g., visible light) is applied to thinned samples (e.g., ultra-thinned samples) to achieve a spatial resolution for laser voltage probing (LVP) analysis to be performed on smaller technology node silicon-on-insulator (SOI) and bulk devices. Thinning of a semiconductor material included in the IC (e.g., backside material) can be controlled such that the thinned semiconductor material has sufficient thickness to enable operation of one or more features comprising the IC during LVP investigation.
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