Invention Grant
- Patent Title: Optical module
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Application No.: US14809431Application Date: 2015-07-27
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Publication No.: US09599788B2Publication Date: 2017-03-21
- Inventor: Jan Horn , Benedikt Knauf
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102013203035 20130225
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G02B7/182 ; G02B5/09 ; G02B26/08 ; G03F7/20 ; G02B5/08 ; G02B19/00 ; G21K1/06

Abstract:
The present invention relates to an optical module, in particular facet mirror, comprising an optical element and a supporting structure for supporting the optical element, wherein the supporting structure comprises a positioning device for actively setting a position and/or orientation of the optical element in at least one degree of freedom. The supporting structure comprises a selectively activatable contacting device having at least one contacting unit having a first contact section, wherein the first contact section, in an activated state of the contacting device, contacts a second contact section of the optical element in order to exert a contact force on the optical element, while the first contact section, in a deactivated state of the contacting device is removed from the second contact section.
Public/Granted literature
- US20160025952A1 Optical Module Public/Granted day:2016-01-28
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