Invention Grant
- Patent Title: Foil trap and light source device using such foil trap
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Application No.: US14915845Application Date: 2014-09-05
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Publication No.: US09599812B2Publication Date: 2017-03-21
- Inventor: Christof Metzmacher , Hermann Giese , Achim Weber , Hironobu Yabuta , Rolf Theo Anton Apetz , Tatsushi Igarashi , Hiroto Sato , Noritaka Ashizawa
- Applicant: USHIO DENKI KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: USHIO DENKI KABUSHIKI KAISHA
- Current Assignee: USHIO DENKI KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2013-184870 20130906
- International Application: PCT/JP2014/004571 WO 20140905
- International Announcement: WO2015/033572 WO 20150312
- Main IPC: H05G2/00
- IPC: H05G2/00 ; G02B27/00 ; G03F7/20 ; H05H1/48 ; H05H1/44

Abstract:
Disclosed herein a rotational type foil trap that is capable of avoiding the transmission rate of the EUV light to be lowered even when the EUV light source operates with the high input power and also suppressing the temperature increase of the foil to attain a sufficient life duration. In the rotational type foil trap, one end of each of foils is inserted into each of a plurality of grooves provided on a side face of a center support, and the center support and the each of the foils are fixed together by brazing.
Public/Granted literature
- US20160195714A1 FOIL TRAP AND LIGHT SOURCE DEVICE USING SUCH FOIL TRAP Public/Granted day:2016-07-07
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