Invention Grant
- Patent Title: Charged particle microscope with barometric pressure correction
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Application No.: US14938689Application Date: 2015-11-11
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Publication No.: US09601310B2Publication Date: 2017-03-21
- Inventor: Marco Hugo Petrus Moers , Albert Visscher
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI COMPANY
- Current Assignee: FEI COMPANY
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Priority: EP14192805 20141112
- Main IPC: H01J37/26
- IPC: H01J37/26
Abstract:
A method of mitigating the effects of environmental pressure variation while using a charged particle microscope is described. The charged particle microscope equipped with a barometric pressure sensor and an automatic controller configured to use the signal from the barometric sensor as an input to a control procedure to compensate for a relative positional error between the charged particle beam and the specimen holder.
Public/Granted literature
- US20160133437A1 CHARGED PARTICLE MICROSCOPE WITH BAROMETRIC PRESSURE CORRECTION Public/Granted day:2016-05-12
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