Invention Grant
- Patent Title: Substrate treatment apparatus, and substrate treatment method
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Application No.: US14822242Application Date: 2015-08-10
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Publication No.: US09601358B2Publication Date: 2017-03-21
- Inventor: Akiyoshi Aomatsu , Shoji Uemae , Kazuki Nakamura , Yoshinori Izumi , Nobutaka Tanahashi
- Applicant: SCREEN Holdings Co., Ltd.
- Applicant Address: JP
- Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee: SCREEN Holdings Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2014-165555 20140815; JP2014-165556 20140815
- Main IPC: B08B9/28
- IPC: B08B9/28 ; H01L21/67

Abstract:
The inventive substrate treatment apparatus includes: a rotative treatment control unit which controls a first chemical liquid supplying unit and a second chemical liquid supplying unit to perform a first chemical liquid supplying step of supplying a first chemical liquid to a substrate rotated by a substrate holding and rotating mechanism and a second chemical liquid supplying step of supplying a second chemical liquid to the substrate rotated by the substrate holding and rotating mechanism after the first chemical liquid supplying step; and a cleaning control unit which controls the cleaning liquid supplying unit to spout the cleaning liquid from the cleaning liquid outlet port to supply the cleaning liquid to the cup inner wall and/or the base wall surface before start of the second chemical liquid supplying step after end of the first chemical liquid supplying step, and/or during and/or after the second chemical liquid supplying step.
Public/Granted literature
- US20160045938A1 SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE TREATMENT METHOD Public/Granted day:2016-02-18
Information query
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