Invention Grant
- Patent Title: Selecting one or more parameters for inspection of a wafer
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Application No.: US13148473Application Date: 2010-02-05
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Publication No.: US09601393B2Publication Date: 2017-03-21
- Inventor: Chris Lee , Lisheng Gao , Tao Luo , Kenong Wu , Tommaso Torelli , Michael J. Van Riet , Brian Duffy
- Applicant: Chris Lee , Lisheng Gao , Tao Luo , Kenong Wu , Tommaso Torelli , Michael J. Van Riet , Brian Duffy
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- International Application: PCT/US2010/023396 WO 20100205
- International Announcement: WO2010/091307 WO 20100812
- Main IPC: G01N21/95
- IPC: G01N21/95 ; H01L21/66
Abstract:
Computer-implemented methods, computer-readable media, and systems for selecting one or more parameters for inspection of a wafer are provided.
Public/Granted literature
- US20110320149A1 Selecting One or More Parameters for Inspection of a Wafer Public/Granted day:2011-12-29
Information query
