Invention Grant
- Patent Title: Thin layer deposition apparatus utilizing a mask unit in the manufacture of a display device
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Application No.: US13966499Application Date: 2013-08-14
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Publication No.: US09601449B2Publication Date: 2017-03-21
- Inventor: Jong Yun Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2013-0007626 20130123
- Main IPC: H01L27/32
- IPC: H01L27/32 ; C23C14/42 ; H01L23/00 ; H01L51/00 ; C23C14/04 ; H01L51/56
Abstract:
A mask unit for depositing a thin layer in a display device. The mask unit includes: a bead mask support which includes a plate; and a bead mask which is placed on the bead mask support.
Public/Granted literature
- US20140203247A1 THIN LAYER DEPOSITION APPARATUS UTILIZING A MASK UNIT IN THE MANUFACTURE OF A DISPLAY DEVICE Public/Granted day:2014-07-24
Information query
IPC分类:
