Invention Grant
- Patent Title: Mechanical resonating structures including a temperature compensation structure
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Application No.: US14565261Application Date: 2014-12-09
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Publication No.: US09602074B2Publication Date: 2017-03-21
- Inventor: David M. Chen , Jan H. Kuypers , Alexei Gaidarzhy , Guiti Zolfagharkhani
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H03H9/02
- IPC: H03H9/02
Abstract:
Mechanical resonating structures are described, as well as related devices and methods. The mechanical resonating structures may have a compensating structure for compensating temperature variations.
Public/Granted literature
- US20150091412A1 MECHANICAL RESONATING STRUCTURES INCLUDING A TEMPERATURE COMPENSATION STRUCTURE Public/Granted day:2015-04-02
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