Invention Grant
- Patent Title: Processing apparatus
-
Application No.: US14030003Application Date: 2013-09-18
-
Publication No.: US09603231B2Publication Date: 2017-03-21
- Inventor: Tomoaki Osada , Masami Hasegawa
- Applicant: CANON ANELVA CORPORATION
- Applicant Address: JP Kawasaki-shi
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2011-083113 20110404
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306 ; H05H1/00 ; H01L21/67 ; H01J37/32

Abstract:
A processing apparatus includes a substrate supporting unit that supports a substrate in a processing space in which the substrate is processed, a first partitioning member that includes a ceiling portion having an opening and partitions the processing space from an outer space, and a second partitioning member that is attached to the first partitioning member so as to close the opening and partition the processing space from the outer space together with the first partitioning member. The second partitioning member is attached to the first partitioning member so that the second partitioning member is removable from the first partitioning member by moving the second partitioning member toward a space which a lower surface of the ceiling portion faces.
Public/Granted literature
- US20140014269A1 PROCESSING APPARATUS Public/Granted day:2014-01-16
Information query
IPC分类: