Invention Grant
- Patent Title: Gas barrier film, method of producing a gas barrier film, and electronic device
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Application No.: US13988295Application Date: 2011-11-18
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Publication No.: US09603268B2Publication Date: 2017-03-21
- Inventor: Issei Suzuki
- Applicant: Issei Suzuki
- Applicant Address: JP Tokyo
- Assignee: KONICA MINOLTA, INC.
- Current Assignee: KONICA MINOLTA, INC.
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz & Volek PC
- Priority: JP2010-258630 20101119
- International Application: PCT/JP2011/076663 WO 20111118
- International Announcement: WO2012/067230 WO 20120524
- Main IPC: H05K5/02
- IPC: H05K5/02 ; H01L21/02 ; H05B33/04 ; C08J7/04 ; C08J7/12 ; C23C14/06 ; H01L51/52

Abstract:
Provided is a gas barrier film including a base, a first barrier layer containing silicon which is formed on at least one surface of the base, and a second barrier layer containing silicon oxynitride which is formed on the first barrier layer. The water vapor transmission rate (g/m2/day) at 40° C. and 90% RH in a structure in which the first barrier layer is formed on the base is R1 and the water vapor transmission rate (g/m2/day) at 40° C. and 90% RH in a structure in which the first barrier layer and the second barrier layer are laminated on the base is R2, and the ratio of the water vapor transmission rate R1 to the water vapor transmission rate R2 (R1/R2) is 80 or more and 5000 or less. Hereby, excellent barrier performance can be exhibited under a high-temperature and high-humidity environment.
Public/Granted literature
- US20130252002A1 GAS BARRIER FILM, METHOD OF PRODUCING A GAS BARRIER FILM, AND ELECTRONIC DEVICE Public/Granted day:2013-09-26
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