Invention Grant
- Patent Title: Method for depositing electrically insulating layers
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Application No.: US11937071Application Date: 2007-11-08
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Publication No.: US09605338B2Publication Date: 2017-03-28
- Inventor: Jürgen Ramm , Christian Wohlrab
- Applicant: Jürgen Ramm , Christian Wohlrab
- Applicant Address: CH PFAFFIKON SZ
- Assignee: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Current Assignee: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Current Assignee Address: CH PFAFFIKON SZ
- Agency: Pearne & Gordon LLP
- Main IPC: C23C14/08
- IPC: C23C14/08 ; C23C14/32 ; C23C14/00 ; H01J37/32

Abstract:
The invention relates to a method for operating an arc source, whereby an electric spark discharge is ignited and run on the surface of a target and the spark discharge is simultaneously fed a direct current with an associated constant voltage DV as well as a pulsed current generated by a periodically applied voltage signal. The voltage at the arc source is boosted over several microseconds and the shape of the voltage signal is in essence arbitrarily selectable.
Public/Granted literature
- US20080286496A1 Method for depositing electrically insulating layers Public/Granted day:2008-11-20
Information query
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