Invention Grant
- Patent Title: Physical vapor deposition RF plasma shield deposit control
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Application No.: US13786866Application Date: 2013-03-06
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Publication No.: US09605341B2Publication Date: 2017-03-28
- Inventor: Keith A. Miller
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/35 ; H01J37/32 ; H01J37/34

Abstract:
Methods and apparatus for processing a substrate in a physical vapor deposition (PVD) chamber are provided herein. In some embodiments, a process kit shield used in a substrate processing chamber may include a shield body having an inner surface and an outer surface, a process kit shield impedance match device coupled between the shield body and ground, wherein the process kit shield impedance match device is configured to adjust a bias voltage of the process kit shield, a cavity formed on the outer surface of the shield body, and one or more magnets disposed within the cavity.
Public/Granted literature
- US20140251789A1 PHYSICAL VAPOR DEPOSITION RF PLASMA SHIELD DEPOSIT CONTROL Public/Granted day:2014-09-11
Information query
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