- Patent Title: Method for forming magnesium oxide thin film and processed plate
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Application No.: US14343719Application Date: 2012-03-09
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Publication No.: US09605357B2Publication Date: 2017-03-28
- Inventor: Tomofumi Susaki , Hideo Hosono , Tadahiro Fujihashi , Yoshitake Toda
- Applicant: Tomofumi Susaki , Hideo Hosono , Tadahiro Fujihashi , Yoshitake Toda
- Applicant Address: JP Saitama
- Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee Address: JP Saitama
- Agency: Michael Best & Friedrich LLP
- Priority: JP2011-197562 20110909
- International Application: PCT/JP2012/056191 WO 20120309
- International Announcement: WO2013/035360 WO 20130314
- Main IPC: C30B23/02
- IPC: C30B23/02 ; C30B23/06 ; B01D53/02 ; C30B29/16 ; B01J20/04 ; B01J20/32

Abstract:
A method for depositing a magnesium oxide thin film on a substrate by a laser abrasion method using a sintered body or single crystal of magnesium oxide as a target. In this method, a flat processed film made of magnesium oxide having a (111) plane as its front surface is prepared, using a substrate made of strontium titanate having a (111) plane as its principal surface or yttria-stabilized zirconia having a (111) plane as its principal surface, by directly depositing a film on the principal surface of the substrate and epitaxially growing the film.
Public/Granted literature
- US20140230724A1 METHOD FOR FORMING MAGNESIUM OXIDE THIN FILM AND PROCESSED PLATE Public/Granted day:2014-08-21
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