Invention Grant
- Patent Title: Cryopump and method for vacuum pumping non-condensable gas
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Application No.: US14219720Application Date: 2014-03-19
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Publication No.: US09605667B2Publication Date: 2017-03-28
- Inventor: Takahiro Yatsu
- Applicant: Sumitomo Heavy Industries, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Heavy Industries, Ltd.
- Current Assignee: Sumitomo Heavy Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2013-057050 20130319
- Main IPC: B01D8/00
- IPC: B01D8/00 ; F25B19/00 ; F04B37/08 ; F04B37/04 ; F04B37/02

Abstract:
A cryopump includes: a radiation shield that includes a shield front end that defines a shield opening, a shield bottom portion, and a shield side portion that extends between the shield front end and the shield bottom portion; and a cryopanel assembly that is cooled to a lower temperature than that of the radiation shield. The cryopanel assembly includes a first panel arrangement including a plurality of first adsorption panels and a plurality of second panel arrangements each including a plurality of second adsorption panels. The first panel arrangement forms a multitude of adsorption sections arranged in a lattice-shaped pattern in cooperation with the plurality of second panel arrangements, each of the adsorption sections being exposed to the shield side portion.
Public/Granted literature
- US20140283531A1 CRYOPUMP AND METHOD FOR VACUUM PUMPING NON-CONDENSABLE GAS Public/Granted day:2014-09-25
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