Invention Grant
- Patent Title: Substrate loading device
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Application No.: US14154980Application Date: 2014-01-14
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Publication No.: US09605797B2Publication Date: 2017-03-28
- Inventor: Gyeong-Hee Han
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Giheung-Gu, Yongin-si, Gyeonggi-Do
- Agent Robert E. Bushnell, Esq.
- Priority: KR10-2013-0017471 20130219
- Main IPC: F16M13/00
- IPC: F16M13/00 ; H01L21/673

Abstract:
A substrate loading device including a frame part forming a loading space in which a plurality of substrates are loaded, and having an inlet surface in which the substrates are inserted, and a rear surface opposite to the inlet surface, a main support protruding from the rear surface of the frame part to support a rear side of the loaded substrates and a sub support mounted at the inlet surface of the frame part and protruding from the inlet surface to support a front and opposite side of the loaded substrates.
Public/Granted literature
- US20140231370A1 SUBSTRATE LOADING DEVICE Public/Granted day:2014-08-21
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