Invention Grant
- Patent Title: Flow rate measuring mechanism, mass flow controller, and pressure sensor
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Application No.: US13499671Application Date: 2010-09-17
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Publication No.: US09605985B2Publication Date: 2017-03-28
- Inventor: Shigeyuki Hayashi , Akira Kuwahara
- Applicant: Shigeyuki Hayashi , Akira Kuwahara
- Applicant Address: JP Kyoto-shi
- Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee: HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Kyoto-shi
- Agency: Alleman Hall McCoy Russell & Tuttle LLP
- Priority: JP2009-229268 20091001
- International Application: PCT/JP2010/066189 WO 20100917
- International Announcement: WO2011/040270 WO 20110407
- Main IPC: G01F1/36
- IPC: G01F1/36 ; G01F1/88 ; G05D7/06

Abstract:
The present invention is a flow rate measuring mechanism provided with: a body unit that has an internal flow path through which a target fluid to be measured is configured to flow; and a pressure sensor that is attached to the body unit and senses a pressure of the internal flow path, and configured to calculate a flow rate of the fluid on the basis of the fluid pressure sensed by the pressure sensor, wherein the body unit has a length direction and a surface parallel to the length direction, which is set as a component attachment surface, and to the component attachment surface, the pressure sensor is attached such that a pressure sensitive surface thereof is substantially vertical to the component attachment surface and substantially parallel to the length direction, and thereby, without causing a reduction in pressure measurement sensitivity, makes a width direction size dramatically smaller than before.
Public/Granted literature
- US20120180876A1 FLOW RATE MEASURING MECHANISM, MASS FLOW CONTROLLER, AND PRESSURE SENSOR Public/Granted day:2012-07-19
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