Invention Grant
- Patent Title: Radiation inspecting apparatus
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Application No.: US14735112Application Date: 2015-06-09
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Publication No.: US09606072B2Publication Date: 2017-03-28
- Inventor: Yusuke Tagawa , Hiroshi Oohara , Yoshihiro Ueno
- Applicant: SHIMADZU CORPORATION
- Applicant Address: JP Kyoto
- Assignee: SHIMADZU CORPORATION
- Current Assignee: SHIMADZU CORPORATION
- Current Assignee Address: JP Kyoto
- Agency: McDermott Will & Emery LLP
- Main IPC: G01N23/04
- IPC: G01N23/04 ; G01T7/08

Abstract:
In an X-ray inspecting apparatus, a rotational fluctuation amount of a stage is calculated around a power transmission part of the stage and a stage drive unit as a base point, i.e., the X-axis and Y-axis sliding parts, in accordance with detected positional information from a position detecting sensor. Then, a stage shift amount is calculated in accordance with the rotational fluctuation amount and a distance between the base point and an imaging position on the stage. Here, the stage shift amount corresponds to a positional deviation of the stage at the imaging position caused by an attitude variation of the stage in a yawing direction, and thus is an error in repeated positioning. Accordingly, a tomographic image with high resolution can be generated in consideration of the error in repeated positioning.
Public/Granted literature
- US20160363544A1 RADIATION INSPECTING APPARATUS Public/Granted day:2016-12-15
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