Invention Grant
- Patent Title: Magnetometer using magnetic materials on accelerometer
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Application No.: US14208222Application Date: 2014-03-13
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Publication No.: US09606191B2Publication Date: 2017-03-28
- Inventor: Joseph Seeger , Jin Qiu , Matthew Julian Thompson
- Applicant: Invensense, Inc.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: IPxLaw Group LLP
- Agent Maryam Imam
- Main IPC: G01N27/72
- IPC: G01N27/72 ; G01R33/02 ; G01P15/08 ; G01R33/028 ; H01L21/00

Abstract:
A MEMS device including a first proof mass, a first magnetized magnetic material disposed partially on a surface of the first proof mass, a first spring anchored to a substrate to support the first proof mass, and a first sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient acceleration. The MEMS device further includes a second sensing element coupled to the first proof mass and operable to sense the motion of the first proof mass caused by an ambient magnetic field.
Public/Granted literature
- US20140266170A1 MAGNETOMETER USING MAGNETIC MATERIALS ON ACCELEROMETER Public/Granted day:2014-09-18
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