Invention Grant
- Patent Title: Optical filter including a step section, and analytical instrument and optical apparatus using the optical filter
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Application No.: US14823661Application Date: 2015-08-11
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Publication No.: US09606276B2Publication Date: 2017-03-28
- Inventor: Akira Sano
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-058301 20100315
- Main IPC: G02B27/00
- IPC: G02B27/00 ; G02B5/26 ; G02B6/293 ; G02B26/00 ; G01J3/26 ; G02B1/10
Abstract:
An optical filter includes a first substrate, a second substrate that is opposed to the first substrate, a first reflecting section that is disposed between the first substrate and the second substrate, a second reflecting section that is disposed between the first reflection section and the second substrate, a first gap existing between the first reflecting section and the second reflecting section, a first electrode that is disposed between the first substrate and the second substrate, a second electrode that is disposed between the first electrode and the second substrate, a second gap existing between the first electrode and the second electrode, and a third electrode that is disposed between the first substrate and the second electrode. The second gap is larger than the first gap.
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