Invention Grant
- Patent Title: Resist composition, method of forming resist pattern, polymeric compound and compound
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Application No.: US13895087Application Date: 2013-05-15
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Publication No.: US09606433B2Publication Date: 2017-03-28
- Inventor: Yoshiyuki Utsumi , Masatoshi Arai , Takahiro Dazai , Yoshitaka Komuro
- Applicant: Tokyo Ohka Kogyo Co., Ltd.
- Applicant Address: JP Kawasaki-Shi
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki-Shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2012-112722 20120516; JP2012-258947 20121127
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039

Abstract:
There is provided a resist composition which generates acid upon exposure and exhibits changed solubility in a developing solution by the action of acid, including a base component (A) which exhibits changed solubility in a developing solution by the action of acid, wherein the base component (A) contains a polymeric compound (A1) having a structural unit (a0) represented by general formula (a0) shown below. In the formula, A″ represents an oxygen atom, a sulfur atom or an alkylene group of 1 to 5 carbon atoms which may contain an oxygen atom or a sulfur atom; R1 represents a lactone-containing cyclic group, an —SO2— containing cyclic group or a carbonate-containing cyclic group; and W2 represents a group which is formed by polymerization reaction of a group containing a polymerizable group.
Public/Granted literature
- US20130309614A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, POLYMERIC COMPOUND AND COMPOUND Public/Granted day:2013-11-21
Information query
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