Invention Grant
- Patent Title: Lithographically produced features
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Application No.: US14770340Application Date: 2014-02-25
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Publication No.: US09606440B2Publication Date: 2017-03-28
- Inventor: Idriss Blakey , Ya-Mi Chuang , Andrew Keith Whittaker , Kevin Stanley Jack
- Applicant: THE UNIVERSITY OF QUEENSLAND
- Applicant Address: AU St. Lucia, Queensland
- Assignee: THE UNIVERSITY OF QUEENSLAND
- Current Assignee: THE UNIVERSITY OF QUEENSLAND
- Current Assignee Address: AU St. Lucia, Queensland
- Agency: Nixon & Vanderhye P.C.
- Priority: AU2013900635 20130225
- International Application: PCT/AU2014/000173 WO 20140225
- International Announcement: WO2014/127430 WO 20140828
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/40 ; C08G61/12 ; C09D153/00 ; C08L53/00 ; C08F293/00 ; G03F7/00 ; G03F7/09
Abstract:
The present invention relates to a method for modifying line edge roughness on a lithographically-produced feature in a material, the method comprising applying a block copolymer to an area on the feature having line edge roughness, the block copolymer comprising a charged hydrophilic polymer block and a non-charged hydrophilic polymer block.
Public/Granted literature
- US20160004163A1 LITHOGRAPHICALLY PRODUCED FEATURES Public/Granted day:2016-01-07
Information query
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