Invention Grant
- Patent Title: Monolithic EUV transparent membrane and support mesh and method of manufacturing same
-
Application No.: US14584928Application Date: 2014-12-29
-
Publication No.: US09606459B2Publication Date: 2017-03-28
- Inventor: Bruce Lairson , David Grove , Heidi Lopez , Travis Ayers
- Applicant: LUXEL CORPORATION
- Applicant Address: US WA Friday Harbor
- Assignee: LUXEL CORPORATION
- Current Assignee: LUXEL CORPORATION
- Current Assignee Address: US WA Friday Harbor
- Agency: Cloutier Ortega
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/58 ; G03B27/32 ; G03F7/20 ; G03F1/62
Abstract:
An apparatus according to the present invention comprises a membrane layer and a supporting supportive mesh, wherein the membrane layer and the supportive mesh form a monolithic structure that absorbs less than ten percent of EUV (Extreme Ultraviolet) light passing through it in which the membrane layer is composed of a metal-ceramic composite.
Public/Granted literature
- US20150212434A1 MONOLITHIC EUV TRANSPARENT MEMBRANE AND SUPPORT MESH AND METHOD OF MANUFACTURING SAME Public/Granted day:2015-07-30
Information query
