- Patent Title: Pre space transformer, space transformer manufactured using the pre space transformer, and semiconductor device inspecting apparatus including the space transformer
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Application No.: US14029684Application Date: 2013-09-17
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Publication No.: US09607754B2Publication Date: 2017-03-28
- Inventor: Yoon Hyuck Choi , Kwang Jae Oh , Ki Young Kim
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Seongnam-si, Gyeonggi-Do
- Assignee: SEMCNS CO., LTD
- Current Assignee: SEMCNS CO., LTD
- Current Assignee Address: KR Seongnam-si, Gyeonggi-Do
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2012-0150877 20121221
- Main IPC: H01F27/29
- IPC: H01F27/29 ; G01R31/26 ; G01R1/073
Abstract:
Disclosed herein is a pre space transformer including: a substrate having a first surface and a second surface, which is an opposite surface to the first surface; individual electrodes disposed on the first surface; and common electrodes disposed in the substrate, wherein the individual electrodes are repeatedly disposed while configuring a unit pattern.
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