Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
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Application No.: US15016070Application Date: 2016-02-04
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Publication No.: US09607861B2Publication Date: 2017-03-28
- Inventor: Junji Shiota , Ichiro Kono
- Applicant: TERA PROBE, INC.
- Applicant Address: JP Kagawa
- Assignee: AOI ELECTRONICS CO., LTD.
- Current Assignee: AOI ELECTRONICS CO., LTD.
- Current Assignee Address: JP Kagawa
- Agency: Holtz, Holtz & Volek PC
- Priority: JP2015-022191 20150206
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/56 ; H01L21/683 ; H01L21/304 ; H01L21/306 ; H01L21/78 ; H01L21/308 ; H01L21/768 ; H01L23/00 ; H01L23/31 ; H01L29/06 ; H01L23/525

Abstract:
A method of manufacturing a semiconductor device, including steps of: (a) bonding a support plate to a first main face of a wafer, the first main face having an integrated circuit disposed thereon; (b) thinning the wafer by polishing or grinding a second main face after step (a), the second main face being opposite to the first main face; (c) dividing the wafer into multiple chip bodies concurrently with or after step (b); (d) bonding multiple reinforcing layers to second main faces of the respective chip bodies after step (c); and (e) removing the support plate after step (d).
Public/Granted literature
- US20160233111A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2016-08-11
Information query
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