Invention Grant
- Patent Title: Inline system
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Application No.: US13959816Application Date: 2013-08-06
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Publication No.: US09607872B2Publication Date: 2017-03-28
- Inventor: Kazuma Sekiya
- Applicant: Disco Corporation
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JP2012-180070 20120815
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/68 ; H01L21/67

Abstract:
An inline system including a first apparatus having a first processing unit for processing a workpiece and an unloading area for unloading the workpiece processed by the first processing unit, a second apparatus having a loading area for loading the workpiece unloaded from the unloading area and a second processing unit for processing the workpiece loaded to the loading area, a transfer unit for transferring the workpiece from the unloading area to the loading area, and a position detecting unit for imaging the unloading area to detect the position of the unloading area and also imaging the loading area to detect the position of the loading area. The transfer unit transfers the workpiece from the unloading area to the loading area according to the position of the unloading area and the position of the loading area detected by the position detecting unit.
Public/Granted literature
- US20140050552A1 INLINE SYSTEM Public/Granted day:2014-02-20
Information query
IPC分类: