Invention Grant
- Patent Title: Semiconductor device
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Application No.: US15037077Application Date: 2014-08-15
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Publication No.: US09607996B2Publication Date: 2017-03-28
- Inventor: Sumio Katoh , Naoki Ueda
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Sakai
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP Sakai
- Agency: Keating & Bennett, LLP
- Priority: JP2013-237885 20131118
- International Application: PCT/JP2014/071476 WO 20140815
- International Announcement: WO2015/072196 WO 20150521
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L27/112 ; H01L27/12 ; H01L29/786 ; G02F1/1368 ; H01L27/10 ; G09G3/36 ; H01L29/417

Abstract:
A semiconductor device includes a memory transistor (10A) which is capable of being irreversibly changed from a semiconductor state where drain current Ids depends on gate voltage Vg to a resistor state where drain current Ids does not depend on gate voltage Vg. The memory transistor (10A) includes a gate electrode (3), a metal oxide layer (7), a gate insulating film (5), and source and drain electrodes. The drain electrode (9d) has a multilayer structure which includes a first drain metal layer (9d1) and a second drain metal layer (9d2), the first drain metal layer (9d1) being made of a first metal whose melting point is not less than 1200° C., the second drain metal layer (9d2) being made of a second metal whose melting point is lower than that of the first metal. Part P of the drain electrode 9d extends over both the metal oxide layer (7) and the gate electrode (3) when viewed in a direction normal to a surface of the substrate. The part (P) of the drain electrode (9d) includes the first drain metal layer (9d1) and does not include the second drain metal layer (9d2).
Public/Granted literature
- US20160293613A1 SEMICONDUCTOR DEVICE Public/Granted day:2016-10-06
Information query
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