Invention Grant
- Patent Title: System and method of UV programming of non-volatile semiconductor memory
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Application No.: US14880997Application Date: 2015-10-12
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Publication No.: US09607999B2Publication Date: 2017-03-28
- Inventor: Hsiang-Tai Lu , Chih-Hsien Lin
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L21/3205 ; G11C29/04 ; H01L21/28 ; G11C16/02 ; G11C16/04 ; G11C16/22 ; H01L21/66

Abstract:
A method of forming a semiconductor memory storage device that includes forming first and second doped regions of a first type in a semiconductor substrate and laterally spaced from one another, forming a gate dielectric extends over the semiconductor substrate between the first and second doped regions, forming a floating gate on the gate dielectric, and forming an ultraviolet (UV) light blocking material vertically disposed above the floating gate such that the floating gate remains electrically charged after the semiconductor memory storage device is exposed to UV light.
Public/Granted literature
- US20160035737A1 SYSTEM AND METHOD OF UV PROGRAMMING OF NON-VOLATILE SEMICONDUCTOR MEMORY Public/Granted day:2016-02-04
Information query
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