- Patent Title: Integrated circuit product with bulk and SOI semiconductor devices
-
Application No.: US15193770Application Date: 2016-06-27
-
Publication No.: US09608003B2Publication Date: 2017-03-28
- Inventor: Peter Baars , Hans-Peter Moll , Jan Hoentschel
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L27/12 ; H01L21/308 ; H01L21/321 ; H01L21/762 ; H01L21/84 ; H01L27/06 ; H01L49/02 ; H01L29/08 ; H01L29/417 ; H01L29/66 ; H01L29/78

Abstract:
An integrated circuit product is disclosed including an SOI structure including a bulk semiconductor substrate, a buried insulation layer positioned on the bulk semiconductor substrate and a semiconductor layer positioned on the insulation layer, wherein, in a first region of the SOI structure, the semiconductor layer and the buried insulation layer are removed and, in a second region of the SOI structure, the semiconductor layer and the buried insulation layer are present above the bulk semiconductor substrate. The product further includes a semiconductor bulk device comprising a first gate structure positioned on the bulk semiconductor substrate in the first region and an SOI semiconductor device comprising a second gate structure positioned on the semiconductor layer in the second region, wherein the first and second gate structures have a final gate height substantially extending to a common height level above an upper surface of the bulk semiconductor substrate.
Public/Granted literature
- US20160307926A1 INTEGRATED CIRCUIT PRODUCT WITH BULK AND SOI SEMICONDUCTOR DEVICES Public/Granted day:2016-10-20
Information query
IPC分类: