Invention Grant
- Patent Title: Magnetic tunnel junction (MTJ) memory element having tri-layer perpendicular reference layer
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Application No.: US15174754Application Date: 2016-06-06
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Publication No.: US09608038B2Publication Date: 2017-03-28
- Inventor: Zihui Wang , Yuchen Zhou , Huadong Gan , Yiming Huai
- Applicant: Avalanche Technology, Inc.
- Applicant Address: US CA Fremont
- Assignee: Avalanche Technology, Inc.
- Current Assignee: Avalanche Technology, Inc.
- Current Assignee Address: US CA Fremont
- Agent Bing K. Yen
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/08 ; H01F10/32 ; G11C11/16 ; H01F41/30 ; H01L29/66 ; H01L43/02 ; H01L43/10 ; B82Y25/00

Abstract:
The present invention is directed to an STT-MRAM device comprising a plurality of memory elements. Each of the memory elements includes an MTJ structure in between a seed layer and a cap layer. The MTJ structure includes a magnetic free layer structure and a magnetic reference layer structure with an insulating tunnel junction layer interposed therebetween; and a magnetic fixed layer separated from the magnetic reference layer structure by an anti-ferromagnetic coupling layer. The magnetic reference layer structure includes a first magnetic reference layer formed adjacent to the insulating tunnel junction layer and a second magnetic reference layer separated from the first magnetic reference layer by an intermediate magnetic reference layer. The first, second, and intermediate magnetic reference layers have a first invariable magnetization direction substantially perpendicular to layer planes thereof. The magnetic fixed layer has a second invariable magnetization direction that is opposite to the first invariable magnetization direction.
Public/Granted literature
- US20160284762A1 MAGNETIC RANDOM ACCESS MEMORY HAVING PERPENDICULAR ENHANCEMENT LAYER Public/Granted day:2016-09-29
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