Invention Grant
- Patent Title: Electro-mechanical switching devices
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Application No.: US14788222Application Date: 2015-06-30
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Publication No.: US09608082B2Publication Date: 2017-03-28
- Inventor: Michael Hutzler
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/76 ; H01L31/062 ; G01P15/08 ; H01L29/423 ; B81B3/00 ; H01L27/088
Abstract:
A switching device includes an opening disposed in a substrate. A source is disposed adjacent the opening and has a contact surface parallel to sidewalls of the opening. A drain is disposed adjacent the opening and has a contact surface parallel to the sidewalls of the opening. A moveable gate stack includes a channel and a gate. The moveable gate stack is disposed within the opening.
Public/Granted literature
- US20170005172A1 Electro-Mechanical Switching Devices Public/Granted day:2017-01-05
Information query
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