- Patent Title: Semiconductor device and Zener diode having branch impurity regions
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Application No.: US14882997Application Date: 2015-10-14
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Publication No.: US09608129B1Publication Date: 2017-03-28
- Inventor: Yu-Jui Chang , Cheng-Chi Lin
- Applicant: Macronix International Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner LLP
- Main IPC: H01L29/861
- IPC: H01L29/861 ; H01L29/866 ; H01L29/66 ; H01L29/06

Abstract:
A semiconductor device includes a substrate, a well region of a first-conductivity type disposed in the substrate, a first impurity region of a second-conductivity type and having a plurality of branches disposed in the well region, a second impurity region of the first-conductivity type and having a plurality of branches, and a third impurity region of the first-conductivity type disposed in the well region. The second-conductivity type is opposite to the first-conductivity type. A portion of the first impurity region overlaps a portion of the third impurity region. The plurality of branches of the second impurity region are disposed in the third impurity region, and a portion of the third impurity region is disposed between the first impurity region and the second impurity region.
Public/Granted literature
- US20170110597A1 SEMICONDUCTOR DEVICE AND ZENER DIODE HAVING BRANCH IMPURITY REGIONS Public/Granted day:2017-04-20
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